
| MTF | |
| DOF | Depth of Focus |
| FBL | Flange Back Focal Length |
| EFL | |
| Through Focus | |
| Focus Tilt | Curvature Height |
| S.F.R. | Spatial Frequency Response |
| Tilt Angle | Optical Axis Tilt & Azimuth |
| Image plane Correction | Simulated Active Alignment |
| Limit Resolution | TV Line=2*LR*Sensor Size |
| C.R.A. | Chief Ray Angle |
| Encircle Energy | |
| FOV | (UMA Patent) |
| Optical Distortion |
| Machine Dimensions | 152cm *86cm *170cm |
| Machine Weight | 350 Kg |
| Power Supply | AC220V/10A |
| IPC Operation system | Microsoft Windows 10 |
| Reticle Pattern – 3 types (Optional) | A:Edge (ISO 12233) + Grid B:Cross Line + Grid C:Cross Line |
| MTF Repeatability (10pcs sample、tray in/out 5 times、excluding load & unload) |
Delta MTF : (≤ 200lp/mm) On axis ≤ 1.0 ; off axis ≤ 2.0 |
| Average test times/pc H/W trigger Mode (without tray load and unload) |
1.5s/pc (M6 Lens、through focus range +/-0.04) 8ses(Automatic object distances switching between infinity and 10cm) (The Object distance will be switched automatically after the tests of all rotation angles and samples are completed.) |
| Maximum Measuring Frequency | 500lp/mm |
| Limited FBL | > -3.0mm |
| Reticle Size Limited | Max.12mm*12mm ( >12mm customized) Min.1.6mm*1.6mm |
| LED Light Source | Visible : Photopic NIR : 850nm or 940nm (Optional) |